Course syllabus

Process- och komponentteknologi
Processing and Device Technology

FFF110, 7,5 credits, G2 (First Cycle)

Valid for: 2016/17
Decided by: Education Board B
Date of Decision: 2016-03-29

General Information

Main field: Nanoscience.
Main field: Technology.
Compulsory for: N3
Elective for: E4-fh, E4-is, F4, F4-hn, F4-nf, MSOC2
Language of instruction: The course will be given in English


The purpose of this course is to provide fundamental knowledge about fabrication and characterization of semiconductor devices on the nanometer scale. The focus is set on modern materials and processing techniques with nanotechnology as a main theme. Most of the processes are general and are applied in traditional Si based IC technology as well as in advanced III-V technology and MEMS/NEMS fabrication.

Learning outcomes

Knowledge and understanding
For a passing grade the student must

Competences and skills
For a passing grade the student must


Materials properties of semiconductors. Device fabrication: process overview, comparison between III/V and Si. Processes: Epitaxy, doping, ion implantation, diffusion, etching, lithography. Recent methods as e.g. surface functionalization and nanoimprint lithography will also be treated. Metal-semiconductor interfaces, which are of significant importance in a number of applications will be covered. Fabrication and applications of p-n junction diodes and characterization and modeling of their electronic and optoelectronic properties. Fabrication and principles for MEMS/NEMS (micro/nano-electromechanical systems) will also be treated. In a number of laboratory exercises, some of the covered process steps will be applied in order to make working devices. Since it is highly important that semiconductor processing is carried out in a clean and dust free environment, strong emphasis will be put on clean room work methods. Finally, some advanced semiconductor structures and their properties will be demonstrated.

Examination details

Grading scale: TH
Assessment: Written examination and approved laboratory exercises.

Code: 0116. Name: Processing and Device Technology.
Credits: 7,5. Grading scale: TH.
Code: 0216. Name: Laboratory Exercises and Report.
Credits: 0. Grading scale: UG.


Required prior knowledge: FFFF01 Electronic Materials or FFFF05 Solid State Physics or ESS030 Physics of Devices.
The number of participants is limited to: 70
Selection: 1. Students for whom the course is compulsory are guaranteed admission 2. Least number of credits remaining for the degree.

Reading list

Contact and other information

Course coordinator: Dr. Claes Thelander,
Course homepage:
Further information: One laboratory report must be written in English.