Valid for: 2024/25
Faculty: Faculty of Engineering LTH
Decided by: PLED N
Date of Decision: 2024-04-10
Effective: 2024-05-08
Main field: Nanoscience
Depth of study relative to the degree requirements: First cycle, in-depth level of the course cannot be classified
Mandatory for: MNAV1, N3
Elective for: E4, F4, F4-nf, F4-fel, F4-kv, MFOT1
Language of instruction: The course will be given in English
The purpose of this course is to provide fundamental knowledge about fabrication and characterization of semiconductor devices on the nanometer scale. The focus is set on modern materials and processing techniques with nanotechnology as a main theme. Most of the processes are general and are used in silicon-based IC-technology, solar cells, III-V devices (e.g. LEDs/lasers), as well as in electro-mechanical systems.
Knowledge and understanding
For a passing grade the student must
Competences and skills
For a passing grade the student must
Judgement and approach
For a passing grade the student must
During a series of laboratory sessions, some of the processing steps will be used for fabricating functioning devices. As it is very important that semiconductor processing is done in extremely clean and dust free environment, clean room working methodology will be emphasized.
Grading scale: TH - (U, 3, 4, 5) - (Fail, Three, Four, Five)
Assessment: Written examination and approved laboratory exercises and report.
The examiner, in consultation with Disability Support Services, may deviate from the regular form of examination in order to provide a permanently disabled student with a form of examination equivalent to that of a student without a disability.
Modules
Code: 0322. Name: Processing and Device Technology.
Credits: 5.5. Grading scale: TH - (U, 3, 4, 5).
Assessment: Written examination
Code: 0422. Name: Laboratory Exercises and Report.
Credits: 2.0. Grading scale: UG - (U, G).
Assessment: Laboratory report in English.
Assumed prior knowledge:
FFFF01 Electronic Materials or FFFF05 Solid State Physics or ESSF20 Physics of Devices.
The number of participants is limited to: 70
Selection: 1. Students for whom the course is compulsory are guaranteed admission
2. Completed university credits within the programme.
Kursen överlappar följande kurser:
FFF110
FFFF10
Course coordinator: Dr. Claes Thelander,
claes.thelander@ftf.lth.se
Course homepage: https://canvas.education.lu.se/courses/11994