Valid for: 2013/14
Decided by: Education Board A
Date of Decision: 2013-04-15
Main field: Nanoscience.
Elective for: D4, E4, E4-ssr, F4, F4-ssr, F4-nf, MSOC2, N4-nf
Language of instruction: The course will be given in English on demand
Measurement technology and transducers are important in every field of activity for an engineer. For example, detailed studies of brain signals, detection of light in optical fibres or supervision of process industries. The amount of micro sensors is increased in the society, especially in the automobile industry where airbag sensors, tilt sensors and tire pressure sensors are standard today.
Knowledge and understanding
For a passing grade the student must
Competences and skills
For a passing grade the student must
Judgement and approach
For a passing grade the student must
The course is characterised by experimental and independent work, combined with a series of lectures that presents the fabrication and physical principles of silicon based micro sensors. Laboratory work and project focus on fabrication of silicon micro structures together with studies and characterization of the sensors that you fabricate in the clean room laboratory work. Basic knowledge in process technology for micro mechanical components and sensors will be given. For example, lithography steps and etch methods will be discussed.
Grading scale: TH
Assessment: For grade 3 is required teoretical study with written report, passed project and accompished poster presentation. For a higher grade a written exam is given.
Required prior knowledge: ESSF10, EEM007 Electrical Measurements.
The number of participants is limited to: 28
Selection: 1. Number of credits attained in courses given by the department. 2. The specific topic of commenced thesis. 3. Number of credits left until final degree.
The course overlaps following course/s: EEM050
Course coordinator: Martin Bengtsson, martin.bengtsson@elmat.lth.se
Course homepage: http://www.elmat.lth.se/