Syllabus academic year 2011/2012
(Created 2011-09-01.)
MICRO SENSORSEEMN01
Credits: 7,5. Grading scale: TH. Cycle: A (Second Cycle). Main field: Technology. Language of instruction: The course might be given in English. EEMN01 overlaps following cours/es: EEM050. Optional for: D4, E4, E4ssr, F4, F4nf, F4ssr, MNAV1, MSOC1, N4nf. Course coordinator: Martin Bengtsson, martin.bengtsson@elmat.lth.se, Electrical Measurements. Recommended prerequisits: ESSF10, EEM007 Electrical Measurements. The number of participants is limited to 28 Selection criteria: 1. Number of credits attained in courses given by the department. 2. The specific topic of commenced thesis. 3. Number of credits left until final degree. Assessment: For grade 3 is required teoretical study with written report, passed project and accompished poster presentation. For a higher grade a written exam is given. Home page: http://www.elmat.lth.se/.

Aim
Measurement technology and transducers are important in every field of activity for an engineer. For example, detailed studies of brain signals, detection of light in optical fibres or supervision of process industries. The amount of micro sensors is increased in the society, especially in the automobile industry where airbag sensors, tilt sensors and tire pressure sensors are standard today.

Knowledge and understanding
For a passing grade the student must

Skills and abilities
For a passing grade the student must

Judgement and approach
For a passing grade the student must

Contents
The course is characterised by experimental and independent work, combined with a series of lectures that presents the fabrication and physical principles of silicon based micro sensors. Laboratory work and project focus on fabrication of silicon micro structures together with studies and characterization of the sensors that you fabricate in the clean room laboratory work. Basic knowledge in process technology for micro mechanical components and sensors will be given. For example, lithography steps and etch methods will be discussed.

Literature
e-books accessible from the university library