Syllabus academic year 2007/2008

Higher education credits: 6. Grading scale: TH. Level: A (Second level). Language of instruction: The course might be given in English. Optional for: C4, D4, E3ss, F4, F4rs, MSOC2, N4, N4nf. Course coordinator: Lars Wallman,, Inst f elektrisk mätteknik. Recommended prerequisits: ESS070 or EEM007 Electrical Measurements. The number of participants is limited to 24 Selection criteria: 1. Number of credits attained in courses given by the department. 2. The specific topic of commenced thesis. 3. Number of credits left until final degree. Assessment: For grade 3 it is required that the student have passed the project and done a poster presentation. For a higher grade a written exam is given. Home page:

Measurement technology and transducers are important in every field of activity for an engineer. For example, detailed studies of brain signals, detection of light in optical fibres or supervision of process industries. The amount of micro sensors is increased in the society, especially in the automobile industry where airbag sensors, tilt sensors and tire pressure sensors are standard today.

Knowledge and understanding
For a passing grade the student must

Skills and abilities
For a passing grade the student must

Judgement and approach
For a passing grade the student must

The course is characterised by experimental and independent work, combined with a serie of lectures that presents the fabrication and physical principles of silicon based micro sensors. Laboration and project focus on fabrication of silicon micro structures together with studies and characterization of the sensors that you fabricate in the clean room laboration. Basic knowledge in process technology for micro mechanical components and sensors will be given. For example, lithography steps and etch methods will be discussed.

Sze S M: Semiconductor Sensors. John Wiley &Sons Inc. 1994.
ISBN: 0-471-54609-7. (Recommended literature.)